Silicon Carbide Cantilevers Duav
Cov khoom lag luam kom ntxaws thiab daim ntawv thov
Loj wafer loading force silicon carbide SiSiC / SiC cantilever paddle / nqaj yog tsim rau neeg hlau tsis siv neeg thau khoom thiab tuav lub zog vim nws muaj cov kev ua haujlwm ruaj khov, tsis deformation hauv qhov kub thiab loj wafer loading quab yuam. Txij li ntu ntawm cantilever paddle nyob ruaj khov nrog tsis muaj qhov hloov kho, nws muaj peev xwm ua kom loj dua ntawm lub taub dej uas siv cov raj cua sov uas twb muaj lawm. Loj wafer loading quab yuam silicon carbide SiSiC / SiC cantilever paddle / nqaj tuaj yeem siv rau LPVCD raws nws cov cua sov zoo sib xws nrog cov txheej txheem LPVCD, uas ntev ntev rau kev saib xyuas thiab tu lub voj voog, thiab txo tau cov pa phem.
Kev tsis ntawm cov tshuaj tiv thaiv sib raug zoo silicon carbide RBSIC:
| yam | chav nyob | cov ntaub ntawv |
| Kub ntawm daim ntawv thov | ℃ | 1380 |
| qhov ntom ntom | G / cm3 | > = 3.02 |
| Qhib porosity | % | <0.1 |
| Moh's Nplai ntawm Hardness | 13 | |
| Dabtsi yog khoov lub zog | Mpa | 250 (20 ℃) |
| Mpa | 280 (1200 ℃) | |
| Modulus ntawm elasticity | Gpa | 330 (20 ℃) |
| Gpa | 300 (1200 ℃) | |
| Thermal conductivity | W / mk | 45 (1200 ℃) |
| Qhov sib tshooj ntawm thermal nthuav dav | K-1 * 10-6 | 4.5 |
| Acid-ntawv pov thawj alkaline | Zoo heev |
Nta:
a. Nws tsis txawv txav thaum kub thiab lub zog wafer loading loj yog loj;
b. Zoo heev thermal poob siab tsis kam thiab kev pab lub neej ntev;
c. Lub thermal expansion coefficient ntawm cantilever paddle yog qhov tsawg heev, uas ntev ntev rau kev txij nkawm thiab ntxuav tu;
thiab ruaj txo kom muaj kuab paug rau
Lwm rooj tog qhov cub ua los ntawm silicon carbide ceramic
Dhau li ntawm Reaction sintered silicon carbide SiSiC cantilever paddle rau wafer loading, peb kuj tsim lwm qhov rooj tog kiln nrog rau RBSIC / SISIC silicon carbide nqaj, nozzle leeg, kauv nozzle raj, yauv nozzle raj, oxide bonded SIC silicon carbide batts / setter phaj thiab RBSIC cov kav dej txias Cov.
Coj tiv thaiv RBSIC / SISIC silicon carbide cov khoom lag luam
Vim tias peb RBSIC / SISIC silicon carbide cov khoom muaj qhov zoo ntawm cov coj zoo tiv thaiv, kev tiv thaiv corrosion thiab lub neej ntev kev pab, nws tseem tuaj yeem ua rau coj cov hlua tiv taus uas tuaj yeem ntsia tau yooj yim hauv kev ua cov kav dej lossis cua daj cua dub.
